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Custom Vacuum End Cap Flanges

INVAC Systems specializes in the design and manufacture of vacuum end cap flanges for                     Quartz, SiC, or Alumina tubes for the Semiconductor, Solar, and MEM's Industries.

We offer water cooled vacuum flanges, or non-cooled flanges for low temperature applications.

Our Spare Parts Division has an extensive inventory of new and used Furnace Parts:

  • Spare Parts for:
       BTI -Thermco Horizontal Furnaces
       SVG/Thermco Vertical Furnaces
       Jipelec JETFIRST RTA/RTP
       Semco Engineering/LYDOP Furnaces
       Persys External Torches
  • Schumacher ATCS Controller Repair:
       ATCS15-TLC - For Transl-LC
       ATCS15 - For POCl3
       ATCS15-HT - For High Temp Applications
  • New and Used Quartz & SIC:
       Quartz & SIC Boats, Disks
       Quartz & SIC Tubes
       Quartz Paddle Alignment Kits


  • Field Service:
        On-Site and Service Contract available

INVAC Systems continuously works with Labs, Universities, and large scale Semiconductor Productions facilities to produce flanges for atmospheric and vacuum applications to seal tubes from 50mm to 420mm.

Furthermore, we provide full leak check and orbital micro welding services, design and fabrication of gas panels, process modifications, equipment wafer size upgrades and other retrofits.

INVAC Systems offers a full line of Semiconductor Specialty Products for Horizontal & Vertical Furnaces.  Let our Engineers design away your problems!