Spring Loaded Door Struts
for VTR7000 Vertical Furnaces
has a solution to your intermittent Door Seal Problems!
Try our Spring Loaded Door Struts for Atmospheric and LPCVD
doors for Aviza/SVG VTR7000 Vertical Furnaces. Each door
requires (2) door support strut and (1) door locating strut.
Improve your sealing capability and range of motion. OEM
Door Struts have a range of motion of 0.15" while our new
improved design gives you 0.30" of door travel.
Loaded Door Struts will help to eliminate cracking and
splintering of quartz pedestal feet on Atmospheric VTR systems.
The spring loaded action still allows the proper sealing
pressure for your Tursite seal and o-ring without
over-compression that can cause premature failure and burning of
On LPCVD VTR systems, Spring Loaded Door
Struts will help give an even distribution of compression of the
door plate to the vacuum flange. This will help eliminate
over-compression and o-ring deformation. Over-compression
can result in "Sticking" o-rings, where the o-ring melts to the
vacuum flange and door.
Visual Indicator for Spring Loaded Door Struts
increased the stroke by over 50% from the factory original VTR
Spring Loaded Door Struts and added a visual indicator on both
sides. No longer is it difficult to see how much
your door is compressed. Each strut can be checked to
ensure proper compression.