JETSTAR Series - RTP/RTA Rapid Thermal Reactor
offers SPARE Parts and Technical Support for existing customers,
and can quote NEW Reactors for customers wanting the most
advanced state-of-the-art RTP/RTA platform on the market.
The Jipelec JETSTAR has been developed to meet the requirements of organizations
that perform large scale R&D, or are transfering a process to productin. This
RTP tool is designed with a manual loading system for your process development or
pilot production. It can be upgraded to an automatic cassette-to-cassette system,
allowing your process to move to production in the shortest time.
Stand Alone - Single Chamber Reactor
Wafer Size: 100 to 300mm
Cassette to Cassette Capability
Ideal for Large Scale R&D Labs & Industrial Applications
NEED A QUOTE - WE CAN HELP YOU!
Applications Include: RTCVD - RTA - RTO - RTN - and
Field Service - Technical Support
Spare Parts (Susceptors, Pyrometers, Lamps, Quartz)