SEMCO Logosolar semiconductor
BTI Refurbished
  • Semco Engineering - JIPELEC

JETSTAR Series - RTP/RTA Rapid Thermal Reactor

INVAC Systems offers SPARE Parts and Technical Support for existing customers, and can quote NEW Reactors for customers wanting the most advanced state-of-the-art RTP/RTA platform on the market.

The Jipelec JETSTAR has been developed to meet the requirements of organizations that perform large scale R&D, or are transfering a process to productin. This RTP tool is designed with a manual loading system for your process development or pilot production. It can be upgraded to an automatic cassette-to-cassette system, allowing your process to move to production in the shortest time.
  • Stand Alone - Single Chamber Reactor
  • Wafer Size: 100 to 300mm
  • Cassette to Cassette Capability
  • Ideal for Large Scale R&D Labs & Industrial Applications

  •                                                  NEED A QUOTE - WE CAN HELP YOU!

    Applications Include:  RTCVD - RTA - RTO - RTN - and more...

     Field Service - Technical Support       Spare Parts (Susceptors, Pyrometers, Lamps, Quartz)


                     Download or print a JETSTAR Brochure (PDF Format)


                     Download or print a Quote Request Form (PDF Format)