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Horizontal Furnace - Rear Flange Back Plates


INVAC Systems has a perfect addition to your rear Flange - a Removable Back Plate.  You no longer have to compromise the flange vacuum seal in order to have access to the rear of your process chamber.  Our removable back plates make maintenance easier and faster for removing liners, injectors, and vacuum components.

Each back plate can be designed, process specific, to accomodate the exact Profile TC and internal injector positions required for process tubes with, and without liners.

Our back plates can adapt to almost any vacuum connection:  ISO, NW, KF, etc....

Do different injector locations confuse your technicians?  Do you have a single port back plate used with a liner and without?  We can custom engrave your back plate with a specific process name or furnace name at your request to eliminate any assembly errors during maintenance.

 

                 Download or print a Back Plate Brochure (PDF Format)

 

                 Download or print a Back Plate Specification Form (PDF Format)

Eliminate Errors

Engrave

Your Plates

Today!


TIPS:  How do you seal your Profile TC and Injectors?

Ultra-Torr Fittings create a great vacuum seal for LPCVD systems.  They are commonly used in applications where fixed positioning of the Profile TC is performed manually on each furnace.  They are also commonly used on applications where more than one TC or Injector are clustered together in a tight area.

Ball Joint Fittings also create a great vacuum seal for LPCVD systems.  They are commonly used in applications where fixed, repeatable, placement of the Profile TC, or Injector, is required.  Ball Joints can be used in conjunction with Ultra-Torr Fittings for tight area applications, or by themselves, as long as enough space is allowed for the pinch clamps.